AMAT Centura DPS2
Applied Materials
蝕刻設備
- 4 Port Loader ×1
- Main Body with Robot
- Three Chamber
- Power Rack
AMAT Endura
Applied Materials
PVD 物理氣相沉積系統
ASM A412 Furnace
ASM International
高溫爐管設備
Kokusai QUIXACE 12寸爐管
Kokusai Electric
垂直爐管系統
TEL LITHIUS
Tokyo Electron
黃光光阻塗佈顯影機
TEL Triase+
Tokyo Electron
CVD 薄膜設備
TEL Triase EX-II
Tokyo Electron
Metal CVD 薄膜設備
TEL Furnace Indy Plus Poly
Tokyo Electron
多晶矽爐管設備
TEL ACT12
Tokyo Electron
黃光光阻塗佈顯影機
- Chemical Box ×1
- 3 Port Loader ×1
(Type 4 Main Controller / Spin Driver PCB Complect)
- PRB (2Coater no hot plate)
- INR TCU ×1
- Power Rack ×1
NOVELLUS C3 ALTUS
Novellus Systems
CVD 化學氣相沉積系統
LAM 2300
LAM Research
蝕刻設備
KLA AIT III
KLA Corporation
晶圓檢測設備
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