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TEL Track 中古零件供應

Tokyo Electron Track 系列設備專用零件
完整庫存、快速出貨、品質保證

Main Controller

TEL ACT Track
TEL ACT Track Main Controller
Main Controller Type 2 Qty: 2
Main Controller Type 3 Qty: 2
Main Controller Type 4 Qty: 2

Cooling Plate & Hot Plate

Lithius Pro Z
TEL Lithius Pro Z Cooling Plate Hot Plate
CPHP Qty: 12
CGHP Qty: 12
CSWP Qty: 15

Cooling Plate & Hot Plate

TEL ACT8
TEL ACT8 Track LHP HHP
HHP Model-814 Qty: 10
LHP Model-813 Qty: 27
Cooling Plate Model-812 Qty: 20
CHP Model-825 Qty: 1
AD-Unit Model-811 Qty: 3

PRA Base Board

TEL ACT8
TEL ACT8 PRA Base Board 2981-600408-12 TEL ACT8 PRA Base Board Label
2981-600408-12 PRA BASE BOARD Qty: 1

Chemical I/O Board

TEL ACT8
TEL ACT8 Chemical I/O Board TOB1015 CPC-T0015A-11 TEL ACT8 Chemical I/O Board Label TOB1015 TEL ACT8 Chemical I/O Board Part Number CPC-T0015A-11
CPC-T0015A-11 CHEMICAL I/O BOARD TOB1015 Qty: 1

Board.IO MTR #02

TEL ACT8
TEL ACT8 Board.IO MTR #02 MPC-T0048A-11 TOB1048 TEL ACT8 Board.IO MTR #02 Label
MPC-T0048A-11 BOARD.IO MTR #02 TOB1048 Qty: 1

Power Box

TEL ACT Track
TEL ACT Track Power Box MSE343
MSE181D Qty: 5
MSE181G Qty: 5
MSE343 Qty: 6

AC Power Box

TEL ACT12 Track
TEL Clean Track ACT12 AC Power Box PB121-U150-02W-T(SP) TEL Clean Track ACT12 AC Power Box Label
PB121-U150-02W-T(SP) AC200/220V 150A 3Phase 50/60Hz Qty: 2

AC Servo Driver

Panasonic
Panasonic AC Servo Driver MSDA011A1A
MSDA011A1A 100-115V / 100W / 2500P/r Qty: 10

Water Cooling Unit

Komatsu
Komatsu MCE-52W-A Water Cooling Unit
MCE-52W-A 6A 50/60Hz Qty: 1

Power Unit

MR-2015
MR-2015 Power Unit
MR-2015 6A Power ON/OFF Qty: 1

Thermo-Con

SMC
SMC Thermo-Con INR-244-230A
INR-244-230A 200V 50/60Hz 3A Qty: 6

Servopack

Yaskawa
Yaskawa Servopack CACR-IR
CACR-IR 020202F B Qty: 8

AC Servo Driver

NSK / TEL ACT8
NSK ESA AC Servo Driver
庫存中・可出貨

NSK ESA-LYA2AFH-20

NSK / AC Servo Driver / Y 軸 / TEL ACT8
品牌NSK
型號ESA-LYA2AFH-20
類型AC 伺服驅動器
適用軸Y 軸
機台型號TEL ACT8
數量8
狀態中古・實機庫存
價格歡迎詢價

NSK ESA-LYA2AFH-20 AC 伺服驅動器,專用於 TEL ACT8 塗佈顯影機 Y 軸驅動控制,提供精密位置控制與高速響應,確保晶圓搬送的高重複精度。

NSK ESA AC Servo Driver
庫存中・可出貨

NSK ESA-J1003A23-21

NSK / AC Servo Driver / Theta 軸 / TEL ACT8
品牌NSK
型號ESA-J1003A23-21
類型AC 伺服驅動器
適用軸Theta 軸
機台型號TEL ACT8
數量8
狀態中古・實機庫存
價格歡迎詢價

NSK ESA-J1003A23-21 AC 伺服驅動器,專用於 TEL ACT8 塗佈顯影機 Theta 軸旋轉驅動控制,確保晶圓旋轉角度精準定位,為塗佈製程均勻性的重要保障。

NSK ESA-Y3008A25-21 AC Servo Driver
庫存中・可出貨

NSK ESA-Y3008A25-21

NSK / AC Servo Driver
品牌NSK
型號ESA-Y3008A25-21
類型AC 伺服驅動器
控制電源AC90-220V
主電源AC200-220V
保險絲250V 10A x2
數量1
狀態中古・實機庫存
價格歡迎詢價

NSK ESA-Y3008A25-21 AC 伺服驅動器,控制電源 AC90-220V、主電源 AC200-220V,配備 RS-232C 通訊介面,Made in Japan。

Inverter

TEL ACT8
Mitsubishi FREQROL-U100 FR-U120-0.75K-F Inverter
庫存中・可出貨

Mitsubishi FR-U120-0.75K-F

Mitsubishi / FREQROL-U100 Inverter / TEL ACT8
品牌Mitsubishi Electric
型號FR-U120-0.75K-F
類型變頻器(Inverter)
功率0.75kW
輸入3PH AC200-230V 50/60Hz
輸出4.1A MAX 3PH AC200-230V / 0.5-120Hz
機台型號TEL ACT8
數量6
狀態中古・PASSED・實機庫存
價格歡迎詢價

Mitsubishi FREQROL-U100 FR-U120-0.75K-F 變頻器,專用於 TEL ACT8 塗佈顯影機,0.75kW 三相輸入,每台均通過 PASSED 測試,Made in Japan。

Wee Fiber

TEL ACT8 全新品
TEL ACT8 Wee Fiber 全新品 增亮款
Wee Fiber 增亮款 全新品

採用增亮技術,可提升 TEL ACT8 晶圓對位感測器亮度 20~30%,有效改善對位精度與穩定性。為全新品,可直接替換安裝。

TEL Clean Track MK 零件庫存

SMC-C85A PCB Board

TEL MK Track
TEL Clean Track MK SMC-C85A PCB Board 381-639006-4 TEL Clean Track MK SMC-C85A PCB Board Label
381-639006-4 SMC-C85A Qty: 1

SSMC-8B PCB Board

TEL MK Track
TEL Clean Track MK SSMC-8B PCB Board 381-639514-2 TEL Clean Track MK SSMC-8B PCB Board Label
381-639514-2 SSMC-8B Qty: 1

SBC-SI/016 PCB Board

TEL MK Track
TEL Clean Track MK SBC-SI/016 PCB Board 381-639506-4 TEL Clean Track MK SBC-SI/016 PCB Board Label
381-639506-4 SBC-SI/016 Qty: 2

tVME-68KSV PCB Board

TEL MK Track
TEL Clean Track MK tVME-68KSV PCB Board 381-639472-4 TEL Clean Track MK tVME-68KSV PCB Board Label
381-639472-4 tVME-68KSV Qty: 2

tVME-UIO/BS-VIF PCB Board

TEL MK Track
TEL Clean Track MK tVME-UIO/BS-VIF PCB Board 1381-645825-11 TEL Clean Track MK tVME-UIO/BS-VIF PCB Board Label
1381-645825-11 tVME-UIO/BS-VIF Qty: 1

tVME-UIO/A SS21V-0 PCB Board

TEL MK Track
TEL Clean Track MK tVME-UIO/A SS21V-0 PCB Board 381-601080-6 TEL Clean Track MK tVME-UIO/A SS21V-0 PCB Board Label
381-601080-6 tVME-UIO/A SS21V-0 Qty: 1

AC Servo Motor Control Board

TEL MK Track
TEL Clean Track MK AC Servo Motor Control Board 381-639178-4 TEL Clean Track MK AC Servo Motor Control Board Label
381-639178-4 MS MPV-0 P Qty: 1

tVME-UIO #2 PCB Board

TEL MK Track
TEL Clean Track MK tVME-UIO #2 PCB Board 381-640994-2 TEL Clean Track MK tVME-UIO #2 PCB Board Label
381-640994-2 tVME-UIO #2 Qty: 6

Wee Fiber

TEL MK8 全新品
TEL MK8 Wee Fiber 全新品 增亮款
Wee Fiber 增亮款 全新品

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