Wafer Handling Robots for Sale
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| Brand | Brooks-PRI Automation |
| Model | 002-9401-01 |
| Type | Series 8 Robot Controller |
| Power Input | 100-240 VAC / 50-60 Hz / 8A |
| Communication | DeviceNet / SIO-1 / SIO-2 / CDM |
| Control Output | Robot Control / Traverser Control |
| Origin | Made in USA |
| Condition | Used · Physical Stock |
| Qty | 2 |
| Price | Please Inquire |
The Brooks-PRI Automation Series 8 is an industry-standard robot controller supporting DeviceNet communication for simultaneous control of robot and traverser axes. Compatible with all Brooks series wafer handling robots — a core control module for semiconductor automation systems.
| Brand | Brooks-PRI Automation |
| Model | 017-0950-01 |
| Serial No. | 0210-10108 |
| Voltage / Current | 24VDC / 20A |
| Origin | Made in USA |
| Application | Semiconductor Wafer Transfer |
| Condition | Used · Physical Stock |
| Qty | 1 |
| Price | Please Inquire |
Brooks-PRI Automation is a globally recognized manufacturer of semiconductor automation equipment. The 017-0950-01 is an atmospheric wafer handling robot with dual-axis encoders, widely used in semiconductor fab automation systems.
| Brand | Nikon Corporation |
| Type | Theta Articulated Robot |
| Origin | Made in Japan |
| Application | Wafer Transfer for Semiconductor Lithography Systems |
| Condition | Used · Physical Stock |
| Qty | 1 |
| Price | Please Inquire |
Genuine Nikon Theta articulated robot designed for wafer transfer in Nikon series semiconductor lithography systems (steppers/scanners). Features a dual-link SCARA structure with high precision — a key handling module for lithography equipment.
| Brand | Canon Inc. |
| Part No. | BY7-3355-000 |
| Origin | Made in Japan |
| Application | Precision Alignment Module for Canon Lithography Systems |
| Condition | Used · Physical Stock |
| Qty | 2 |
| Price | Please Inquire |
Genuine Canon precision alignment module for Canon series semiconductor lithography systems (steppers/scanners). Contains a laser alignment system, rotary stage, and drive motor — a critical component for exposure equipment, suitable as a replacement spare.
| Brand | Nabtesco Corporation |
| Model | 2L80-000155-11 |
| Serial No. | B722 |
| Origin | Made in Japan |
| Application | Robot Joint Precision Reducer |
| Condition | Used · Physical Stock |
| Qty | 1 |
| Price | Please Inquire |
Nabtesco is a world-leading manufacturer of precision reducers, widely used in semiconductor robot joint drives. The 2L80 series is made in Japan with high precision and long service life — ideal as a replacement part or standby inventory.
| Brand | ASYST JAPAN INC. |
| Model | UTX-F5500C-006B |
| Serial No. | A4Z122901-1 |
| Controller | CS-7100 |
| Origin | Made in Japan |
| Application | Semiconductor Wafer Transfer (FOUP / SMIF) |
| Condition | Used · Physical Stock |
| Qty | 2 |
| Price | Please Inquire |
The ASYST Japan UTX series is a standard automation robot widely used in semiconductor wafer fabs for FOUP and SMIF handling. This unit is manufactured in Japan with stable, proven performance — suitable as a spare or production unit.
| Brand | Yaskawa Electric Japan |
| Model | XU-RVM4110 |
| Serial No. | S92505-1-01 |
| Type | Manipulator (Wafer Transfer Robot) |
| Weight | 55 kg |
| Date of Manufacture | March 2010 |
| Machine Model | TEL CVD Trias EX-II |
| Condition | Used · Physical Stock |
| Qty | 2 |
| Price | Please Inquire |
The Yaskawa Electric XU-RVM4110 is a dedicated wafer transfer manipulator for the TEL CVD Trias EX-II, handling precise wafer transport and positioning between process chambers. Weighing 55 kg, it features robust construction, accurate motion, and reliable long-term performance. A core component of the CVD automated transfer system — used physical stock, direct drop-in replacement.
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