Main Controller
TEL ACT Track
Main Controller Type 2 Qty: 2
Main Controller Type 3 Qty: 2
Main Controller Type 4 Qty: 2
Cooling Plate & Hot Plate
Lithius Pro Z
CPHP Qty: 12
CGHP Qty: 12
CSWP Qty: 15
Cooling Plate & Hot Plate
TEL ACT8
HHP Model-814 Qty: 10
LHP Model-813 Qty: 27
Cooling Plate Model-812 Qty: 20
CHP Model-825 Qty: 1
AD-Unit Model-811 Qty: 3
PRA Base Board
TEL ACT8
2981-600408-12 PRA BASE BOARD Qty: 1
Chemical I/O Board
TEL ACT8
CPC-T0015A-11 CHEMICAL I/O BOARD TOB1015 Qty: 1
Board.IO MTR #02
TEL ACT8
MPC-T0048A-11 BOARD.IO MTR #02 TOB1048 Qty: 1
Power Box
TEL ACT Track
MSE181D Qty: 5
MSE181G Qty: 5
MSE343 Qty: 6
AC Power Box
TEL ACT12 Track
PB121-U150-02W-T(SP) AC200/220V 150A 3Phase 50/60Hz Qty: 2
AC Servo Driver
Panasonic
MSDA011A1A 100-115V / 100W / 2500P/r Qty: 10
Water Cooling Unit
Komatsu
MCE-52W-A 6A 50/60Hz Qty: 1
Power Unit
MR-2015
MR-2015 6A Power ON/OFF Qty: 1
Thermo-Con
SMC
INR-244-230A 200V 50/60Hz 3A Qty: 6
Servopack
Yaskawa
CACR-IR 020202F B Qty: 8
AC Servo Driver
NSK / TEL ACT8
In Stock · Ready to Ship
NSK ESA-LYA2AFH-20
NSK / AC Servo Driver / Y-Axis / TEL ACT8
| Brand | NSK |
| Model | ESA-LYA2AFH-20 |
| Type | AC Servo Driver |
| Axis | Y-Axis |
| Machine Model | TEL ACT8 |
| Quantity | 8 |
| Condition | Used · Physical Stock |
| Price | Inquire for Quote |
NSK ESA-LYA2AFH-20 AC servo driver dedicated to the Y-axis drive of the TEL ACT8 coater/developer. Provides precision position control and high-speed response to ensure high repeatability in wafer transport operations.
In Stock · Ready to Ship
NSK ESA-J1003A23-21
NSK / AC Servo Driver / Theta-Axis / TEL ACT8
| Brand | NSK |
| Model | ESA-J1003A23-21 |
| Type | AC Servo Driver |
| Axis | Theta-Axis |
| Machine Model | TEL ACT8 |
| Quantity | 8 |
| Condition | Used · Physical Stock |
| Price | Inquire for Quote |
NSK ESA-J1003A23-21 AC servo driver for Theta-axis rotational control of the TEL ACT8 coater/developer. Ensures precise wafer rotational angle positioning — critical for coating uniformity in the spin-coat process.
AC Servo Driver
NSK
In Stock · Ready to Ship
NSK ESA-Y3008A25-21
NSK / AC Servo Driver
| Brand | NSK |
| Model | ESA-Y3008A25-21 |
| Type | AC Servo Driver |
| Control Power | AC90-220V |
| Main Power | AC200-220V |
| Fuse | 250V 10A x2 |
| Qty | 1 |
| Condition | Used · In Stock |
| Price | Please Inquire |
NSK ESA-Y3008A25-21 AC servo driver. Control power AC90-220V, main power AC200-220V, equipped with RS-232C communication interface. Made in Japan.
Inverter
TEL ACT8
In Stock · Ready to Ship
Mitsubishi FR-U120-0.75K-F
Mitsubishi / FREQROL-U100 Inverter / TEL ACT8
| Brand | Mitsubishi Electric |
| Model | FR-U120-0.75K-F |
| Type | Inverter |
| Power | 0.75kW |
| Input | 3PH AC200-230V 50/60Hz |
| Output | 4.1A MAX 3PH AC200-230V / 0.5-120Hz |
| Machine | TEL ACT8 |
| Qty | 6 |
| Condition | Used · PASSED · In Stock |
| Price | Please Inquire |
Mitsubishi FREQROL-U100 FR-U120-0.75K-F inverter for TEL ACT8 coater/developer. 0.75kW three-phase input. Each unit has passed functional testing. Made in Japan.
Wee Fiber
TEL ACT8 New
Wee Fiber Enhanced Brightness New
Enhanced brightness design that improves the TEL ACT8 wafer alignment sensor brightness by 20~30%, effectively improving alignment accuracy and stability. Brand new — direct drop-in replacement.
TEL Clean Track MK Parts Stock
SMC-C85A PCB Board
TEL MK Track
381-639006-4 SMC-C85A Qty: 1
SSMC-8B PCB Board
TEL MK Track
381-639514-2 SSMC-8B Qty: 1
SBC-SI/016 PCB Board
TEL MK Track
381-639506-4 SBC-SI/016 Qty: 2
tVME-68KSV PCB Board
TEL MK Track
381-639472-4 tVME-68KSV Qty: 2
tVME-UIO/BS-VIF PCB Board
TEL MK Track
1381-645825-11 tVME-UIO/BS-VIF Qty: 1
tVME-UIO/A SS21V-0 PCB Board
TEL MK Track
381-601080-6 tVME-UIO/A SS21V-0 Qty: 1
AC Servo Motor Control Board
TEL MK Track
381-639178-4 MS MPV-0 P Qty: 1
tVME-UIO #2 PCB Board
TEL MK Track
381-640994-2 tVME-UIO #2 Qty: 6