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TEL Track Used Parts Supply

Tokyo Electron Track Series Equipment Parts
Full Inventory · Fast Delivery · Quality Assured

Main Controller

TEL ACT Track
TEL ACT Track Main Controller
Main Controller Type 2 Qty: 2
Main Controller Type 3 Qty: 2
Main Controller Type 4 Qty: 2

Cooling Plate & Hot Plate

Lithius Pro Z
TEL Lithius Pro Z Cooling Plate Hot Plate
CPHP Qty: 12
CGHP Qty: 12
CSWP Qty: 15

Cooling Plate & Hot Plate

TEL ACT8
TEL ACT8 Track LHP HHP
HHP Model-814 Qty: 10
LHP Model-813 Qty: 27
Cooling Plate Model-812 Qty: 20
CHP Model-825 Qty: 1
AD-Unit Model-811 Qty: 3

PRA Base Board

TEL ACT8
TEL ACT8 PRA Base Board 2981-600408-12 TEL ACT8 PRA Base Board Label
2981-600408-12 PRA BASE BOARD Qty: 1

Chemical I/O Board

TEL ACT8
TEL ACT8 Chemical I/O Board TOB1015 CPC-T0015A-11 TEL ACT8 Chemical I/O Board Label TOB1015 TEL ACT8 Chemical I/O Board Part Number CPC-T0015A-11
CPC-T0015A-11 CHEMICAL I/O BOARD TOB1015 Qty: 1

Board.IO MTR #02

TEL ACT8
TEL ACT8 Board.IO MTR #02 MPC-T0048A-11 TOB1048 TEL ACT8 Board.IO MTR #02 Label
MPC-T0048A-11 BOARD.IO MTR #02 TOB1048 Qty: 1

Power Box

TEL ACT Track
TEL ACT Track Power Box MSE343
MSE181D Qty: 5
MSE181G Qty: 5
MSE343 Qty: 6

AC Power Box

TEL ACT12 Track
TEL Clean Track ACT12 AC Power Box PB121-U150-02W-T(SP) TEL Clean Track ACT12 AC Power Box Label
PB121-U150-02W-T(SP) AC200/220V 150A 3Phase 50/60Hz Qty: 2

AC Servo Driver

Panasonic
Panasonic AC Servo Driver MSDA011A1A
MSDA011A1A 100-115V / 100W / 2500P/r Qty: 10

Water Cooling Unit

Komatsu
Komatsu MCE-52W-A Water Cooling Unit
MCE-52W-A 6A 50/60Hz Qty: 1

Power Unit

MR-2015
MR-2015 Power Unit
MR-2015 6A Power ON/OFF Qty: 1

Thermo-Con

SMC
SMC Thermo-Con INR-244-230A
INR-244-230A 200V 50/60Hz 3A Qty: 6

Servopack

Yaskawa
Yaskawa Servopack CACR-IR
CACR-IR 020202F B Qty: 8

AC Servo Driver

NSK / TEL ACT8
NSK ESA AC Servo Driver
In Stock · Ready to Ship

NSK ESA-LYA2AFH-20

BrandNSK
ModelESA-LYA2AFH-20
Quantity8
NSK ESA AC Servo Driver
In Stock · Ready to Ship

NSK ESA-J1003A23-21

BrandNSK
ModelESA-J1003A23-21
Quantity8

AC Servo Driver

NSK
NSK ESA-Y3008A25-21 AC Servo Driver
In Stock · Ready to Ship

NSK ESA-Y3008A25-21

BrandNSK
ModelESA-Y3008A25-21
Qty1

Inverter

TEL ACT8
Mitsubishi FREQROL-U100 FR-U120-0.75K-F Inverter
In Stock · Ready to Ship

Mitsubishi FR-U120-0.75K-F

BrandMitsubishi Electric
ModelFR-U120-0.75K-F
Qty6

Wee Fiber

TEL ACT8 New
TEL ACT8 Wee Fiber New Enhanced Brightness
Wee Fiber Enhanced Brightness New

Enhanced brightness design that improves the TEL ACT8 wafer alignment sensor brightness by 20~30%, effectively improving alignment accuracy and stability. Brand new — direct drop-in replacement.

DC Power

TEL Lithius 300mm
LAMBDA DENSEI-LAMBDA DPS2800 DC Power TEL Lithius 300mm LAMBDA DPS2800 DC Power Nameplate Label
In Stock · Ready to Ship

LAMBDA DPS2800

BrandLAMBDA (DENSEI-LAMBDA)
ModelDPS2800
Quantity3

Main Controller

TEL Lithius 300mm
TEL Lithius Main Controller TEL Lithius 300mm
In Stock · Ready to Ship

TEL Lithius Main Controller

BrandTEL (Tokyo Electron)
Quantity1

Touch Monitor

TEL Lithius 300mm
Mitsubishi TSD-T192-M-TEL Touch Monitor Front Mitsubishi TSD-T192-M-TEL Touch Monitor Back Panel Mitsubishi TSD-T192-M-TEL Nameplate Label
In Stock · Ready to Ship

Mitsubishi TSD-T192-M-TEL

BrandMitsubishi Electric Engineering
ModelTSD-T192-M-TEL
Quantity1

TEL Clean Track MK Parts Stock

SMC-C85A PCB Board

TEL MK Track
TEL Clean Track MK SMC-C85A PCB Board 381-639006-4 TEL Clean Track MK SMC-C85A PCB Board Label
381-639006-4 SMC-C85A Qty: 1

SSMC-8B PCB Board

TEL MK Track
TEL Clean Track MK SSMC-8B PCB Board 381-639514-2 TEL Clean Track MK SSMC-8B PCB Board Label
381-639514-2 SSMC-8B Qty: 1

SBC-SI/016 PCB Board

TEL MK Track
TEL Clean Track MK SBC-SI/016 PCB Board 381-639506-4 TEL Clean Track MK SBC-SI/016 PCB Board Label
381-639506-4 SBC-SI/016 Qty: 2

tVME-68KSV PCB Board

TEL MK Track
TEL Clean Track MK tVME-68KSV PCB Board 381-639472-4 TEL Clean Track MK tVME-68KSV PCB Board Label
381-639472-4 tVME-68KSV Qty: 2

tVME-UIO/BS-VIF PCB Board

TEL MK Track
TEL Clean Track MK tVME-UIO/BS-VIF PCB Board 1381-645825-11 TEL Clean Track MK tVME-UIO/BS-VIF PCB Board Label
1381-645825-11 tVME-UIO/BS-VIF Qty: 1

tVME-UIO/A SS21V-0 PCB Board

TEL MK Track
TEL Clean Track MK tVME-UIO/A SS21V-0 PCB Board 381-601080-6 TEL Clean Track MK tVME-UIO/A SS21V-0 PCB Board Label
381-601080-6 tVME-UIO/A SS21V-0 Qty: 1

AC Servo Motor Control Board

TEL MK Track
TEL Clean Track MK AC Servo Motor Control Board 381-639178-4 TEL Clean Track MK AC Servo Motor Control Board Label
381-639178-4 MS MPV-0 P Qty: 1

tVME-UIO #2 PCB Board

TEL MK Track
TEL Clean Track MK tVME-UIO #2 PCB Board 381-640994-2 TEL Clean Track MK tVME-UIO #2 PCB Board Label
381-640994-2 tVME-UIO #2 Qty: 6

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