EX-II
Machine Model
MKS 631D-32705
| Brand | MKS Instruments |
| Model | 631D-32705 |
| Type | Heated Capacitance Manometer |
| Machine Model | TEL CVD Trias EX-II |
| Quantity | 6 |
| Condition | Used · Physical Stock |
| Price | Inquire for Quote |
MKS Instruments 631D series heated capacitance manometer for high-accuracy pressure measurement in the TEL CVD Trias EX-II process chamber. The heated design prevents corrosive process gas condensation, ensuring measurement accuracy and long-term stability — a key component for CVD process pressure control.
VEXTA PK566AEM
| Brand | VEXTA (Oriental Motor) |
| Model | PK566AEM |
| Type | 5-Phase Stepping Motor |
| Machine Model | TEL CVD Trias EX-II |
| Quantity | 4 |
| Condition | Used · Physical Stock |
| Price | Inquire for Quote |
VEXTA (Oriental Motor) PK566AEM 5-phase stepping motor with precision step control and minimal step-angle error. Suitable for gas flow valve actuation or precision mechanism drive in the TEL CVD Trias EX-II — reliable and stable operation.
Panasonic MSMD082S1T
| Brand | Panasonic |
| Model | MSMD082S1T |
| Type | AC Servo Motor |
| Rated Power | 0.75 kW |
| Machine Model | TEL CVD Trias EX-II |
| Quantity | 6 |
| Condition | Used · Physical Stock |
| Price | Inquire for Quote |
Panasonic MINAS series AC servo motor rated at 0.75 kW. High-performance precision drive control with fast response and high positional accuracy — widely used in axis drive systems of the TEL CVD Trias EX-II.
HORIBA STEC SEC-8455F
| Brand | HORIBA STEC |
| Model | SEC-8455F |
| Type | Digital Mass Flow Controller |
| Process Gas | TiCl4 (Titanium Tetrachloride) |
| Flow Range | 300 SCCM |
| Machine Model | TEL CVD Trias EX-II |
| Quantity | 4 |
| Condition | Used · Physical Stock |
| Price | Inquire for Quote |
HORIBA STEC SEC-8455F digital mass flow controller designed for TiCl4 (titanium tetrachloride) processes with a 300 SCCM range. Precisely controls CVD process gas flow — a critical component for TiN thin-film deposition in the TEL CVD Trias EX-II.
RKC RCB-28-6F
| Brand | RKC Instrument |
| Model | RCB-28-6F |
| Type | Multi-Zone Temperature Controller |
| Machine Model | TEL CVD Trias EX-II |
| Quantity | 9 |
| Condition | Used · Physical Stock |
| Price | Inquire for Quote |
RKC Instrument RCB-28-6F multi-zone temperature controller that precisely manages the heating zones of the TEL CVD Trias EX-II. Ensures stable, uniform temperature across the process chamber and gas lines — essential for consistent CVD film quality.
TEL S-BRK-EX-II
| Brand | Tokyo Electron (TEL) |
| Model | S-BRK-EX-II |
| Part Number | 3M80-004605-11 |
| Type | Sub Breaker Box |
| Machine Model | TEL CVD Trias EX-II |
| Quantity | 3 |
| Condition | Used · Physical Stock |
| Price | Inquire for Quote |
TEL OEM sub breaker box dedicated to the EX-II model (P/N: 3M80-004605-11). Core protection component for the TEL CVD Trias EX-II power distribution system — provides subsystem power safety and overload protection with direct OEM replacement compatibility.
HORIBA STEC SEC-N112MGM
| Brand | HORIBA STEC |
| Model | SEC-N112MGM |
| Type | N100 Series Mass Flow Controller |
| Process Gas | N2 (Nitrogen) |
| Flow · Qty | 300 SCCM × 20 3 SLM × 20 5.5 SLM × 20 10 SLM × 20 |
| Machine Model | TEL CVD Trias EX-II |
| Condition | Used · Physical Stock |
| Price | Inquire for Quote |
HORIBA STEC SEC-N112MGM N100 series high-precision nitrogen mass flow controller available in four flow ranges: 300 SCCM, 3 SLM, 5.5 SLM, and 10 SLM — 20 units of each in stock. Used for N2 purge, dilution, and inert gas process control in the TEL CVD Trias EX-II. Ready for immediate shipment.
Yaskawa XU-RVM4110
| Brand | Yaskawa Electric Japan |
| Model | XU-RVM4110 |
| Type | Manipulator (Wafer Transfer Robot) |
| Weight | 55 kg |
| Date of Manufacture | March 2010 |
| Machine Model | TEL CVD Trias EX-II |
| Qty | 2 |
| Condition | Used · Physical Stock |
| Price | Inquire for Quote |
The Yaskawa Electric XU-RVM4110 is a dedicated wafer transfer manipulator for the TEL CVD Trias EX-II, responsible for precise wafer handling and positioning between process chambers. Weighing 55 kg, it offers robust construction, accurate motion control, and reliable performance. A core component of the CVD automated transfer system — used physical stock, direct drop-in replacement.
Fujikin Heated Source Box
| Brand | Fujikin Inc. |
| S/N | ADG294 |
| Type | Heated Chemical Source Box |
| Ports | PURGE / OUTLET / SOURCE |
| Machine Model | TEL CVD Trias EX-II |
| Qty | 2 |
| Condition | Used · Physical Stock |
| Price | Inquire for Price |
Fujikin heated chemical source box with PURGE, OUTLET, and SOURCE tri-directional ports. Maintains precursor temperature via integrated heating control to ensure stable vaporization during CVD processes. Compatible with TEL CVD Trias EX-II precursor delivery system.
Gate Valve LL1 GV
| Model | BX80-070159-15 |
| S/N | V083230 |
| Type | Pneumatic Gate Valve (Load Lock) |
| Actuation | Pneumatic |
| Machine Model | TEL CVD Trias EX-II |
| Qty | 6 |
| Condition | Used · Physical Stock |
| Price | Inquire for Price |
Pneumatically actuated gate valve (Model BX80-070159-15) for load lock chamber isolation on the TEL CVD Trias EX-II. Features OPEN/CLOSE pneumatic ports for reliable vacuum isolation and fast switching — a critical component for maintaining vacuum integrity in the CVD process chamber.
TEL PWRCONT-2Z-A1
| Brand | Tokyo Electron Ltd. |
| Model | PWRCONT-2Z-A1 |
| Part No. | 3M87-060702-41 |
| S/N | 1803594 |
| Weight | 16 Kg |
| Machine Model | TEL CVD Trias EX-II |
| Qty | 5 |
| Condition | Used · Physical Stock |
| Price | Inquire for Price |
Tokyo Electron OEM power controller PWRCONT-2Z-A1, featuring SYSTEM IF1/IF2, INTERLOCK, GHOST LOCAL/MAIN network interfaces, and multi-channel output. Used for power management and temperature control of the TEL CVD Trias EX-II heating system. 16 kg, OEM-spec used physical unit.
TEL PCB ASSY.GUC 1
| Brand | Tokyo Electron Ltd. |
| Model | PCB ASSY.GUC 1 |
| Part No. | 3M80-003985-13 |
| S/N | 46X0002 |
| Machine Model | TEL CVD Trias EX-II |
| Qty | 5 |
| Condition | Used · Physical Stock |
| Price | Inquire for Price |
Tokyo Electron OEM PCB ASSY.GUC 1 control board, Part No. 3M80-003985-13. The core control PCB of the TEL CVD Trias EX-II system, integrating multiple control loops. OEM-spec used physical unit — direct drop-in replacement.
Why Choose Grand Precise
20–30 years of semiconductor equipment repair experience. Specialist supplier for TEL CVD series.
Quality Assurance
Every part is functionally tested to ensure it meets OEM specifications.
Fast Response
Reply within 24 hours of inquiry. Urgent requests are prioritized.
Physical Stock in Taiwan
Local warehouse in Taiwan. We quote only what we have in stock for fast shipping.
Expert Technical Support
Senior engineering team providing repair consultation and technical support for TEL CVD equipment.