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TEL CVD Series

TEL CVD Trias Used Parts

Dedicated parts for Tokyo Electron CVD Trias series equipment
Expanding inventory · Inquiries welcome

EX-II

Machine Model
MKS 631D-32705 MKS 631D-32705 Label
In Stock · Ready to Ship

MKS 631D-32705

BrandMKS Instruments
Model631D-32705
VEXTA PK566AEM
In Stock · Ready to Ship

VEXTA PK566AEM

BrandVEXTA (Oriental Motor)
ModelPK566AEM
Panasonic MSMD082S1T Panasonic MSMD082S1T Label
In Stock · Ready to Ship

Panasonic MSMD082S1T

BrandPanasonic
ModelMSMD082S1T
HORIBA STEC SEC-8455F HORIBA STEC SEC-8455F Label
In Stock · Ready to Ship

HORIBA STEC SEC-8455F

BrandHORIBA STEC
ModelSEC-8455F
RKC RCB-28-6F RKC RCB-28-6F Label
In Stock · Ready to Ship

RKC RCB-28-6F

BrandRKC Instrument
ModelRCB-28-6F
TEL S-BRK-EX-II TEL S-BRK-EX-II Label
In Stock · Ready to Ship

TEL S-BRK-EX-II

BrandTokyo Electron (TEL)
ModelS-BRK-EX-II
HORIBA STEC SEC-N112MGM HORIBA STEC SEC-N112MGM Label
In Stock · Ready to Ship

HORIBA STEC SEC-N112MGM

BrandHORIBA STEC
ModelSEC-N112MGM
Yaskawa XU-RVM4110 Manipulator Yaskawa XU-RVM4110 Nameplate
In Stock · Ready to Ship

Yaskawa XU-RVM4110

BrandYaskawa Electric Japan
ModelXU-RVM4110
Qty2

Heated Source Box

Fujikin
Fujikin Heated Source Box ADG294 Fujikin Heated Source Box Label
In Stock · Ready to Ship

Fujikin Heated Source Box

BrandFujikin Inc.
Qty2

Gate Valve

Load Lock
Gate Valve LL1 GV BX80-070159-15 Gate Valve BX80-070159-15 Label
In Stock · Ready to Ship

Gate Valve LL1 GV

ModelBX80-070159-15
Qty6

Power Controller

Tokyo Electron
TEL PWRCONT-2Z-A1 Power Controller TEL PWRCONT-2Z-A1 Label
In Stock · Ready to Ship

TEL PWRCONT-2Z-A1

BrandTokyo Electron Ltd.
ModelPWRCONT-2Z-A1
Part No.3M87-060702-41
Qty5

Control Box

MILAEBO
MILAEBO CTL-3200 Control Box MILAEBO CTL-3200 Label
In Stock · Ready to Ship

MILAEBO CTL-3200

BrandMILAEBO Co., Ltd.
ModelCTL-3200
Qty3

PCB Assembly

Tokyo Electron
TEL PCB ASSY.GUC 1 3M80-003985-13 TEL PCB ASSY.GUC 1 Label
In Stock · Ready to Ship

TEL PCB ASSY.GUC 1

BrandTokyo Electron Ltd.
ModelPCB ASSY.GUC 1
Part No.3M80-003985-13
Qty5

Control Box

GHOST-CUBIC / APC3
TEL GHOST-CUBIC APC3 Control Box Rear TEL GHOST-CUBIC APC3 Control Box Internal
In Stock · Ready to Ship

TEL GHOST-CUBIC APC3 Control Box

BrandTokyo Electron (TEL)
Qty6

Why Choose Grand Precise

20–30 years of semiconductor equipment repair experience. Specialist supplier for TEL CVD series.

Quality Assurance

Every part is functionally tested to ensure it meets OEM specifications.

Fast Response

Reply within 24 hours of inquiry. Urgent requests are prioritized.

Physical Stock in Taiwan

Local warehouse in Taiwan. We quote only what we have in stock for fast shipping.

Expert Technical Support

Senior engineering team providing repair consultation and technical support for TEL CVD equipment.

Need TEL CVD Trias Used Parts?

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