CCM Remote Control Box
ASML Used
X4 CCM Remote Control Box
| Brand | ASML |
| Description | X4 CCM Remote Control Box |
| Mat No. | 4022.470.08897 |
| BiD | 00000000001177753116 |
| Revision | Rev. A / B / C / D / E |
| Module | maxon motor mmc MIP |
| Indicators | BRD / LB / HW / SAF / MSSL / Error / Power / Reset |
| Condition | Used · In Stock |
| Qty | 8 |
| Price | Please Inquire |
ASML X4 CCM (Cluster Control Module) Remote Control Box, Mat No. 4022.470.08897. A core control module for ASML semiconductor lithography systems (Stepper/Scanner). Features maxon motor mmc MIP drive module with full status indicator LEDs (BRD, LB, HW, SAF, MSSL, Error, Power, Reset). Suitable for ASML equipment repair, replacement, or spare parts inventory.
Robot Hand Pneumatic Unit
Parker / ASML Used
RH-PU Mk3
| Brand | Parker (ASML OEM Supplier) |
| Description | RH-PU Mk3 (Robot Hand Pneumatic Unit) |
| 12NC | 4022.631.2439_ |
| Mat No. | 4022.631.24391 |
| BiD | 00000000114653174 |
| Revision | Rev. A / B / C / D / E |
| Connector | X100 (D-Sub 25-pin) |
| Power | -12V / +12V / +15V / -15V / +24V |
| CDA Pressure | 5 to 8 barg |
| VAC Vacuum | -0.55 TO -0.7 barg |
| Condition | Used · In Stock |
| Qty | 2 |
| Price | Please Inquire |
Parker RH-PU Mk3 (Robot Hand Pneumatic Unit) is a pneumatic control unit for ASML lithography system wafer handling robots, controlling the gripper's pneumatic actuation and vacuum suction. Interfaces via X100 D-Sub 25-pin connector with CCM0/CCM1 control signals supporting TOB GRIP, IRIS, and SET SIG functions. An essential spare part for ASML equipment maintenance and repair.
TRB Transfer Robot Board
ASML Used
TRB (Transfer Robot Board)
| Brand | ASML |
| Description | TRB (Transfer Robot Board) |
| Mat No. | 4022.636.57283 |
| BiD | 00000000117626650 |
| Revision | Rev. A / B / C / D / E |
| Module | maxon motor drive module |
| Indicators | Error / Power / Reset |
| Connectors | X1~X20 (D-Sub, circular, power connectors) |
| Condition | Used · In Stock |
| Qty | 6 |
| Price | Please Inquire |
ASML TRB (Transfer Robot Board), Mat No. 4022.636.57283. A core control module for ASML lithography system wafer transfer robots. Features a maxon motor drive module with 20 multi-type connectors (X1–X20: D-Sub 9/25-pin, mil-spec circular, power connectors), providing multi-axis motion control and signal interfacing for wafer handling robots. An essential spare part for ASML equipment maintenance.
Laser Power Supply Module
Qioptiq / ASML Used
YS EL LPSU MOD ASSY MK4
| Brand | Qioptiq Photonics GmbH (ASML OEM Supplier) |
| Description | YS EL LPSU MOD ASSY MK4 |
| Type | 4022.671.0686.1 / 61 2439 001 |
| Mat No. | 4022.671.26961 |
| Serial No. | 00027 |
| Rated Power | 2240VA |
| Rated Frequency | 48-52 / 58-62 Hz |
| Input Voltage | 230V~ / +10% -15% |
| Output Voltage | 48V DC |
| PSU Modules | 2× HFE1600-48/S |
| Protection Class | Class I |
| Certification | CE |
| Condition | Used · In Stock |
| Qty | 2 |
| Price | Please Inquire |
YS EL LPSU MOD ASSY MK4 (Laser Power Supply Unit Module Assembly MK4), Type 4022.671.0686.1, manufactured by Qioptiq Photonics for ASML excimer laser power supply systems. Contains two HFE1600-48/S PSU modules providing 2240VA rated power with 48V DC output. Made in Germany, CE certified. An essential power component for ASML laser illumination systems.
Pneumatic Valve Assembly
KV Ltd / ASML Used
Pneumatic Valve Assembly
| Brand | KV Ltd Milton Keynes (ASML OEM Supplier) |
| Mat No. | 4022.480.62681 |
| Serial No. | 022706 |
| Solenoid Valve | 01-311P-01-H0 (F01042) |
| Solenoid Power | 24V / 1W |
| Max Pressure | P Max 8 bar |
| Temperature Range | -10°C ~ +60°C |
| Year | 2002 |
| Condition | Used · In Stock |
| Qty | 2 |
| Price | Please Inquire |
Pneumatic valve assembly manufactured by KV Ltd (England) for ASML, Mat No. 4022.480.62681. Features multiple 24V/1W solenoid valves (01-311P-01-H0) with integrated PCB control circuit, rated up to 8 bar, operating between -10°C and +60°C. Used in ASML lithography system wafer handling pneumatic circuits as a key switching component.
Cooling Water Main Power Controller
Thermo Electron / ASML Used
LCWC Main Power Controller
| Description | LCWC (Laser Cooling Water Controller) |
| Manufacturer | Thermo Electron (Karlsruhe) GmbH |
| Type | 009-0033 |
| Mat No. | 4022.637.13581 |
| Input Power | 3×400V/N/PE, 50-60Hz, 3×13A |
| Circuit Breakers | F1-F7 (ABB): HEAT / UVLMP / PUMP / AC PS / DC PS |
| Interfaces | X101 RS-232, X102-X105 BNC Temperature Sensors |
| DC Output | 24Vdc / 5Vdc |
| Display | LCD Panel (LCW FLOW / Manual Filling Control) |
| Condition | Used · In Stock |
| Qty | 2 |
| Price | Please Inquire |
LCWC (Laser Cooling Water Controller) main power controller, Type 009-0033, manufactured by Thermo Electron (Karlsruhe, Germany) for ASML lithography system laser cooling water circulation. Features 7 ABB circuit breakers (F1–F7) for HEAT, UVLMP, PUMP, AC/DC PS circuits, RS-232 port, 4 BNC temperature sensor inputs, LCD display with LCW FLOW control, and 3×400V/13A main power. A core control unit for ASML laser cooling systems.
Host Computer Workstation
Sun Microsystems / ASML Used
Sun Ultra 25 Workstation
| Brand | Sun Microsystems |
| Model | Ultra 25 (Workstation) |
| Mat No. | 9428.999.78330 |
| BiD | 00000000000006668 |
| Revision | Rev. B / C / D / E |
| Application | ASML Lithography System Host Computer |
| OS | Solaris (Sun SPARC Architecture) |
| Condition | Used · In Stock |
| Qty | 1 |
| Price | Please Inquire |
Sun Microsystems Ultra 25 high-performance SPARC workstation, Mat 9428.999.78330, used as the standard host computer for ASML lithography systems (Stepper/Scanner). Runs Solaris OS to execute ASML equipment control software, serving as the core computing platform for exposure tool operation. Ideal for ASML equipment repair, upgrade, or replacement of the host computer.
Host Computer Workstation
Sun Microsystems / ASML Used
Sun SunBlade 2500 Workstation
| Brand | Sun Microsystems |
| Model | SunBlade 2500 (Workstation) |
| Architecture | UltraSPARC IIIi |
| OS | Solaris (Sun SPARC Architecture) |
| Application | ASML Lithography System Host Computer |
| Condition | Used · In Stock |
| Qty | 1 |
| Price | Please Inquire |
Sun Microsystems SunBlade 2500 high-performance UltraSPARC IIIi workstation, used as a host computer for ASML lithography systems (Stepper/Scanner). Runs Solaris OS to execute ASML equipment control software, serving as the core computing platform for exposure tool operation. Suitable for ASML equipment repair, upgrade, or host computer replacement.